Arrangement for securing a mount of an optical element
AssigneeCarl Zeiss SMT GmbH
InventorJohannes Rau
Life of this patent
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Abstract
The invention relates to a securing arrangement for a mount of an optical element, in particular in a lens systems for semiconductor lithography, on a component. The mount is mounted, via three bearing bodies, in corresponding bearing locations of the component in each case. The mount and the component are held together via magnetic forces. The magnetic flux in the component (1) is obstructed in the region of the bearing locations (2) by a section (5) of relatively low permeability and can be short-circuited via the bearing bodies (8), made of magnetically highly permeable material, upon connection of the mount (7) and component (1) by at least one magnet.
Claims15
A securing arrangement for a mount of an optical element, on a component, the mount being mounted, by at least three bearing bodies in corresponding bearing locations of said component, and said mount and said component being held together via magnetic forces, wherein the magnetic flux in said component is obstructed in the region of the bearing locations by a section of relatively low permeability, whereby the magnetic flux via said bearing bodies, made of magnetically highly permeable material, upon connection of said mount and component can be short-circuited by at least one magnet.
Dependencies are inferred from the claim text.