Optical path control apparatus with mirror section, and manufacturing method for the same
AssigneeNEC Corporation
InventorsMikio Oda, Mitsuru Yamamoto, Hikaru Kouta, Yasuhiro Sasaki, Sakae Kitajo, Yuzo Shimada
Life of this patent
Estimating the term…
Abstract
An optical path control apparatus includes a first substrate. A second substrate is movably provided for the first substrate. A mirror section is provided on the second substrate. A driving section moves the second substrate such that a first optical path of input light to the mirror section is optically connected to one of a plurality of second optical paths.
Claims24
An optical path control apparatus comprising:
- a first substrate;
- a second substrate movably provided for said first substrate;
- a mirror section provided on said second substrate;
- and
- a driving section which moves said second substrate such that a first optical path of input light to said mirror section is optically connected to one of a plurality of second optical paths.
An optical path control apparatus comprising:
- a substrate;
- and
- a mirror section which is provided on said substrate and changes an optical path of reflection light to input light by said mirror section in response to an input signal.
A method of manufacturing a mirror section comprising the steps of:
- providing a die of semiconductor having a concave section;
- forming a copper layer on a surface of said die;
- forming a mirror film on said copper layer;
- forming a transforming film on said mirror film;
- film to produce a laminate structure of said copper layer, said mirror film, and said transforming film;
- transferring said laminate structure onto a base;
- and
- removing said copper layer to produce said mirror section on said base.
A method of manufacturing a mirror section comprising the steps of:
- forming a connection layer on a base;
- locating a bump on said connection layer;
- and
- pushing a die against said bump to produce a mirror section.
An optical path control apparatus comprising:
- a first substrate;
- a second substrate movably provided for said first substrate;
- a mirror section provided over said first and second substrate;
- and
- a driving section which moves said second substrate such that a first optical path of input light to said mirror section is optically connected to one of a plurality of second optical paths.
An optical path control apparatus comprising:
- a thermal transforming cell;
- a mirror section provided on said thermal transforming cell;
- and
- a heating section which heats said thermal transforming cell.
A method of switching an output optical path comprising the steps of:
- reflecting input light on an input optical path onto a first output optical path by a mirror section;
- moving or transforming said mirror section;
- and
- optically connecting said input light to a second output optical path through the movement or transformation of said mirror section.
Dependencies are inferred from the claim text.