Frequency tunable resonant scanner with auxiliary arms

A microelectromechanical resonant device, comprising:

• a base;
• a movable body coupled to the base for resonant motion relative to the base about a pivot axis;
• and
• a flexible member extending from the movable body, the flexible member being configured to flex in response to movement of the movable body about the pivot axis, the flexible member being coupled to the movable body at a location offset from the pivot axis.

An optical scanner comprising:

• an oscillatory body;
• a body support coupled to the oscillatory body and configured to permit the oscillatory body to move about a pivot axis;
• and
• a flexible arm coupled to the oscillatory body at a location offset from the pivot axis, the flexible arm being configured to flex in response to movement of the oscillatory body about the pivot axis, wherein flexing of the flexible arm exerts a force on the movable body that opposes movement of the movable body about the pivot axis

A method of scanning with a MEMs device having a movable mirror that is configured to pivot about a pivot axis, comprising the steps of:

• pivoting the movable mirror about the pivot axis;
• bending a flexible arm along an axis substantially normal to the pivot axis in response to the pivoting of the movable mirror about the pivot axis;
• detecting bending of the flexible arm;
• and
• producing an electrical signal in response to the detected bending of the flexible arm, the electrical signal being indicative of pivotal movement of the movable mirror about the pivot axis.