Optical reticle substrate inspection apparatus and beam scanning method of the same

Abstract

An optical reticle substrate inspection apparatus is provided with a laser, a first acoustooptical element which scans a laser beam output form the laser, and a second acoustooptical element which generates a virtual image with a concave lens effect to the laser beam output from the first acoustooptical element. The optical reticle substrate inspection apparatus is further provided with a concave lens arranged on the output side of the laser beam of the second acoustooptical element and an optical system which images the virtual image on a reticle substrate being an object to be inspected. The concave lens magnifies the laser beam in a perpendicular direction to the scanning direction by the first acoustooptical element.

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