Interferometers for measuring changes in optical beam direction
AssigneeZygo Corporation
InventorsHenry Allen Hill, Justin L. Kreuzer
Life of this patent
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AssigneeZygo Corporation
InventorsHenry Allen Hill, Justin L. Kreuzer
Estimating the term…
Apparatus for measuring angular changes in the direction of travel of a light beam comprising at least one beam shearing assembly for separating, preferably orthogonally polarized, components of the light beam and introducing a lateral shear between them. An analyzer operates on the components to provide them with a common polarization state. A lens focuses the commonly polarized components of the light beam to a spot in a detector plane, and a detector operates to generate an electrical signal having a phase that varies in accordance with the angular change of the light beam in at least one plane. Electronic means receive the electrical signal, determines the phase therefrom, and converts the phase to the angular change in the direction of travel of the light beam.
Apparatus for measuring angular changes in the direction of travel of a light beam, said apparatus comprising:
Apparatus for measuring angular changes in the direction of travel of a light beam, said apparatus comprising:
Apparatus for measuring angular changes in the direction of travel of a light beam, said apparatus comprising:
A beam shearing apparatus for introducing a lateral shear between the components of a light beam, said apparatus comprising a polarizing beamsplitter cube having a polarizing interface and input and output facets and two mirrors one of which is arranged at an angle generally opposite said input facet and the other of which is arranged at an angle generally opposite said output facet.
Dependencies are inferred from the claim text.