Small spot ellipsometer
AssigneeTherma-Wave, Inc.
InventorLanhua Wei
Life of this patent
Estimating the term…
Abstract
An ellipsometer capable of generating a small beam spot is disclosed. The ellipsometer includes a light source for generating a narrow bandwidth probe beam. An analyzer is provided for determining the change in polarization state of the probe beam after interaction with the sample. A lens is provided having a numerical aperture and focal length sufficient to focus the beam to a diameter of less than 20 microns on the sample surface. The lens is formed from a graded index glass wherein the index of refraction varies along its optical axis. The lens is held in a relatively stress free mount to reduce stress birefringence created in the lens due to changes in ambient temperature. The ellipsometer is capable of measuring features on semiconductors having a dimensions as small as 50×50 microns.
Claims23
A small spot ellipsometer for evaluating a sample comprising:
- a light source for generating a probe beam which is to be directed to the surface of the sample;
- an analyzer for evaluating the change in polarization state induced in the beam from interacting with the sample;
- and
- a lens for focusing the beam to a spot size having a diameter along both axes of less than 25 microns, said lens having a curved focusing surface and being formed from a material whose index of refraction varies along the optical axis in order to substantially reduce spherical aberration.
A small spot ellipsometer for evaluating a sample comprising:
- a light source for generating a probe beam which is to be directed to the surface of the sample;
- an analyzer for evaluating the change in polarization state induced in the beam from interaction with the sample;
- a lens for focusing the beam to a spot on the sample surface, said lens having a curved focusing surface and being formed from a material whose index of refraction varies along the optical axis in order to substantially reduce spherical aberration and wherein said material has a coefficient of thermal expansion in excess of 1×10−7/K;
- and
- a lens mount including a plurality of flexible O-rings for supporting the lens in a manner to reduce stress birefringence in the lens induced by changes in the ambient temperature.
A small spot ellipsometer for evaluating a sample comprising:
- a gas discharge laser having a stable, narrow-bandwidth output defining a probe beam directed to reflect off the surface of the sample;
- an analyzer for evaluating the change in polarization state induced in the beam when the beam reflects off the sample;
- a lens for focusing the beam to a spot size having a diameter along both axes of less than 20 microns, said lens having a spherical focusing surface, a focal length of less than 50 mm and a numerical aperture less than 0.15 and being formed from a mixture of glass materials arranged so that the index of refraction of the lens varies along the optical axis thereof in order to substantially reduce spherical aberration, said glass materials having a coefficient of thermal expansion in excess of 1×10−7/K;
- and
- a fixed lens mount including a plurality of flexible O-rings for supporting the lens with respect to the lens mount in a manner to reduce stress birefringence in the lens induced by changes in the ambient temperature.
Dependencies are inferred from the claim text.