Illuminating optical apparatus and making method thereof, exposure apparatus and making method thereof, and device manufacturing method

An illuminating optical apparatus to illuminate an object with an energy beam from a light source, comprising:

• a plurality of optical members arranged in a predetermined positional relationship, at least one of said plurality of optical members is a movable member;
• and
• an illuminating system housing disposed around said plurality of optical members to house said plurality of optical members to isolate the interiors thereof from the open air;
• an actuator which is arranged outside said illuminating system housing, and respectively drives said movable member;
• and
• a sensor which is arranged said outside said illuminating system housing, and measures a position or a displacement of at least one of said movable members.

An exposure apparatus of transferring a mask pattern onto a substrate by exposing said substrate with the energy beam via the mask, comprising:

• an illuminating optical system which has
• a first illuminating system housing which isolates a first partial optical system containing a first movable section which is movable during exposure from open air and keeps said first partial optical system in a sealed state, and
• a second illuminating system housing which isolates a second partial optical system physically separated from said first partial optical system containing an optical member of which the movable amount during said exposure is smaller than the movable amount of said first movable section from said open air and keeps said second partial optical system in said sealed state, and
• a main portion for exposure on which said second illuminating system housing is provided, including at least a substrate stage which holds said substrate exposed by said energy beam outgoing said mask;
• a connecting section which isolates from said open air a space between said first illuminating system housing and said second illuminating system housing and keeps said space in a sealed state, and connects said first illuminating system housing and said second illuminating system housing so as to limit the amount of vibration which travels between said two housings.

A method of making an exposure apparatus for transferring a mask pattern onto a substrate by exposing said substrate with the energy beam via the mask, comprising:

• providing a main portion of exposure with a substrate stage incorporated, said substrate stage holding said substrate;
• providing a first illuminating system housing which isolates a first partial optical system containing a first movable section which is movable during exposure from open air and keeps said first partial optical system in a sealed state, and
• installing a second illuminating system housing which isolates a second partial optical system physically separated from said first partial optical system containing an optical member of which the movable amount during said exposure is smaller than the movable amount of said first movable section from said open air and keeps said second partial optical system in said sealed state, to said main portion for exposure, and
• connecting said first illuminating system housing and said second illuminating system housing so as to limit the amount of vibration which travels between said two housings by a connecting section, and isolate from said open air a space between said first illuminating system housing and said second illuminating system housing and keeps said space in a sealed state.

A making method of an illuminating optical apparatus to illuminate an object with an energy beam from a light source, comprising:

• providing at least one of a first optical unit which includes at least one of a drivable first optical member, and a first frame holding said first optical member;
• providing at least one of a second optical unit which has at least one of a second optical member of which a movable amount is smaller than a movable amount of said first optical member, and a second frame holding said second optical member;
• and
• connecting said first frame structuring said first optical unit and said second frame structuring said second optical unit with a first connecting member which displaceably connects said first frame in respect to said second frame.