Reduced size, low loss MEMS torsional hinges and MEMS resonators employing such hinges

Abstract

Torsional hinge support beams (104, 106, 108, 110, 400, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300, 1400, 1500) that are corrugated, perforated and/or have non-uniform width are provided. The support beams are useful in flexural beam resonators (100, 1600), in which they serve to support the main flexural mode-vibrating beam (102, 1602). The support beams have phase lengths equal to an odd multiple of π/2, preferably the phase lengths are about equal to π/2 at the operating frequency of the resonators. Owing to the corrugations, the lengths of the support beams are shorter than comparable solid straight edge support beams. The short lengths of the support beams reduce the overall area occupied by the resonators and allow higher bias voltage to be employed in order to obtain greater electromechanical coupling.

Dependencies are inferred from the claim text.