Multi-frequency thin film resonators
AssigneeAgere Systems Inc.
InventorsBradley Paul Barber, Peter Ledel Gammel, LaRue Norman Dunkleberger
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Abstract
Differing metallic electrodes having the same or differing thickness are formed at different locations on a support structure and/or on a single thickness film of piezoelectric material in order to form a multiple frequency resonator device having greatly separated acoustic resonance frequencies. A plurality of multiple frequency resonators can be combined to form a blank of frequency selective devices in order to handle the many different RF bands, at widely varying frequencies, that wireless communication technologies demand today.
Claims29
A method of producing a multi-frequency resonator device, comprising:
- forming a first metal film region on a substrate;
- forming at least one additional metal film region on the substrate;
- forming a piezoelectric layer on said first and additional metal film regions;
- and
- forming metal films above the first and additional metal films regions and on the piezoelectric layer.
A multi-frequency resonator device, comprising:
- a substrate;
- a first metal film layer provided on the substrate, said first metal film composed of multiple metal regions, each metal region having a thickness;
- a piezoelectric layer provided on said first metal film;
- and
- a second metal film layer provided on the piezoelectric layer.
Dependencies are inferred from the claim text.