Flat panel displays and their fabrication methods
AssigneeHitachi, Ltd.
InventorsMakoto Okai, Takahiko Muneyoshi, Tomio Yaguchi, Nobuaki Hayashi
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Abstract
A flat panel display includes an electron emitter plate provided with electron emitters, a phosphor plate provided with phosphors and a space defined by the electron emitter plate and the phosphor plate for form a substantial vacuum atmosphere therebetween, wherein a great number of fine recess structures are formed on the surface of a metal film formed on the electron emitter plate, and fine fibered substances or carbon nanotubes or substances containing the fine fibered substances or carbon nanotubes are arranged on the fine recess structures to form electron emitters.
Claims10
A flat panel display having an electron emitter plate provided with electron emitters, a phosphor plate provided with phosphors and a space defined by said electron emitter plate and said phosphor plate for form a substantial vacuum atmosphere therebetween,
- wherein a great number of fine recess structures are formed on the surface of a metal film formed on said electron emitter plate, and fine fibered substances or carbon nanotubes or substances containing the fine fibered substances or carbon nanotubes are arranged on said fine recess structures to form electron emitters.
A flat panel display having an electron emitter plate provided with electron emitters, a phosphor plate provided with phosphors and a space defined by said electron emitter plate and said phosphor plate to form a substantial vacuum atmosphere therebetween,
- wherein a great number of fine recess structures are formed on the surface of a metal film formed on said electron emitter plate, and fine fibered substances or carbon nanotubes oriented substantially vertically to a substrate are arranged in said fine recess structures to form electron emitters.
A method of fabricating a flat panel display comprising the steps of:
- forming cathode electrode stripes on a substrate;
- forming fine recess structures on the surface of each of said cathode electrode stripes;
- and
- forming electron emitter stripes on said cathode electrode stripes,
- wherein said fine recess structures on a metal film are formed through a step selected from electrochemical process of plating, dry etching process of sputter and printing process of screen-printing.
A method of fabricating a flat panel display comprising the steps of:
- forming cathode electrode stripes on a substrate;
- forming fine recess structures on the surface of each of said cathode electrode stripes;
- and
- forming electron emitter stripes oriented substantially vertically to said substrate in said fine recess structures, wherein said fine recess structures on said metal film are formed through a step selected from electrochemical process of plating, dry etching process of sputter and printing process of screen-printing.
Dependencies are inferred from the claim text.