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US 2003/0117041 A1Published application
Piezoelectric actuator, method of manufacturing the same, ink-jet head using the same, and ink-jet printer
AssigneeFujitsu Limited
InventorsKazuaki Kurihara, Motoyuki Nishizawa, Masaki Kurasawa, Keishiro Okamoto
Life of this patent
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Abstract
A piezoelectric actuator includes a single-crystal piezoelectric thin film having a crystal orientation aligned with the crystal orientation of a single-crystal Si substrate, and first and second electrode films formed on first and second sides of the single-crystal piezoelectric thin film, respectively.
Claims57
A piezoelectric actuator comprising:
- a single-crystal piezoelectric thin film having a crystal orientation thereof aligned with a crystal orientation of a single-crystal Si substrate;
- and
- first and second electrode films formed on first and second sides of said single-crystal piezoelectric thin film, respectively.
A piezoelectric actuator comprising:
- a plurality of single-crystal piezoelectric thin films each having a crystal orientation thereof aligned with a crystal orientation of a single-crystal Si substrate;
- and
- a plurality of electrode films,
- wherein said single-crystal piezoelectric thin films and said electrode films are alternately layered one over another in contact with each other in a hetero-epitaxial relationship.
1 more element
An ink-jet head comprising:
- a piezoelectric actuator,
- the piezoelectric actuator comprising:
- a single-crystal piezoelectric thin film having a crystal orientation thereof aligned with a crystal orientation of a single-crystal Si substrate;
- and
- first and second electrode films formed on first and second sides of said single-crystal piezoelectric thin film, respectively.
2 more elements
An ink-jet head comprising:
- a piezoelectric actuator,
- the piezoelectric actuator comprising:
- a plurality of single-crystal piezoelectric thin films each having a crystal orientation thereof aligned with a crystal orientation of a single-crystal Si substrate;
- and
- a plurality of electrode films,
- wherein said single-crystal piezoelectric thin films and said electrode films are alternately layered one over another in contact with each other in a hetero-epitaxial relationship.
3 more elements
An ink-jet printer comprising:
- an ink-jet head,
- the ink-jet head comprising:
- a piezoelectric actuator,
- the piezoelectric actuator comprising:
- a single-crystal piezoelectric thin film having a crystal orientation thereof aligned with a crystal orientation of a single-crystal Si substrate;
- and
- first and second electrode films formed on first and second sides of said single-crystal piezoelectric thin film, respectively.
4 more elements
An ink-jet printer comprising:
- an ink-jet head,
- the ink-jet head comprising:
- a piezoelectric actuator, the piezoelectric actuator comprising:
- a plurality of single-crystal piezoelectric thin films each having a crystal orientation thereof aligned with a crystal orientation of a single-crystal Si substrate;
- and
- a plurality of electrode films, wherein said single-crystal piezoelectric thin films and said electrode films are alternately layered one over another in contact with each other in a hetero-epitaxial relationship.
3 more elements
A method of manufacturing a piezoelectric actuator, the method comprising the steps of:
- (a) preparing a single-crystal Si substrate, growing an intermediate film hetero-epitaxially on a surface of the single-crystal Si substrate, and growing a piezoelectric thin film hetero-epitaxially on the intermediate film;
- and
- (b) removing part of the single-crystal Si substrate, the part corresponding to a region driven by the piezoelectric thin film.
Dependencies are inferred from the claim text.