US 2003/0117027 A1Published application

Low inertia latching microactuator

AssigneeInnovative Micro Technology

InventorsTara Jean Rybnicek, John Wesley Stocker, Jeffery Frank Summers, John Stuart Foster, Richard Thomas Martin, Paul John Rubel, Patrick Edward Feierabend

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Abstract

A surface micromachined micromagnetic actuator is described, wherein rotary actuation is accomplished by a member pivotably mounted on the surface of the substrate. Angular motion of the member about the pivot point is imparted by the interaction of a magnetic tab affixed to the member, with flux generated in the gap of an electromagnetic core. Rotary motion is restricted to less than 360 degrees by using an integrally formed hinge between the pivoting member and the pivot point, rather than by a more complex bearing. By virtue of this design, a large range of motion can be achieved without requiring a true bearing to be fabricated in the device. The pivoting member is also constrained in either of two stable positions upon de-energization of the electromagnetic core, by the attachment of a bistable spring between the pivoting member and the substrate.

Claims24

Dependent claims

A micromechanical actuator, comprising:

a nonmagnetic substrate having a top surface;
a fixed magnetic core formed by deposition of ferromagnetic material onto the top surface of the substrate, the magnetic core having end faces spaced apart to define a gap in the core;
a pivotably mounted driven member free to move through an arc of less than 360 degrees and attached to a stationary pivot point;
a protruding magnetic tab affixed to one end of the pivotably mounted driven member, said tab comprising magnetic material and so disposed as to interact with the gap field over a portion of its allowed arc of rotation;
means for supporting the pivotably mounted driven member above the substrate, said means providing the pivot point for angular movement of the member, and allowing the magnetic tab of the member to move through the vicinity of the gap field;
and
a coil of electrical conductor coupled to the fixed magnetic core to provide magnetic flux therethrough when the coil is supplied with electrical current, such that a magnetic field arises in the gap formed in the core which can impel motion to the pivotably mounted driven member by interaction of the gap field with the magnetic protruding tab on said member.

4 more elements

Dependencies are inferred from the claim text.