Flexural device-based suspension having high compliance in a direction of travel and low compliance in a direction orthogonal thereto
AssigneeAgilent Technologies, Inc.
InventorsStorrs T. Hoen, Jonah A. Harley
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Abstract
The flexural device-based suspension suspends a movable element with high compliance in a direction of travel and low compliance in a direction orthogonal to the direction of travel. The suspension comprises two flexural devices and a constraining element. The two flexural devices are connected to the movable element. Each of the flexural devices includes an elongate floating beam disposed substantially parallel to the direction of travel. The constraining element is for constraining relative motion of the floating beams in the direction of travel and for allowing the floating beams to move freely relative to one another in the orthogonal direction.
Claims30
A flexural device-based suspension for suspending a movable element with high compliance in a direction of travel and low compliance in a direction orthogonal thereto, the suspension comprising:
- two flexural devices connected to the movable element, the flexural devices each including an elongate floating beam disposed substantially parallel to the direction of travel;
- and
- constraining means for constraining relative motion of the floating beams in the direction of travel and for allowing the floating beams to move freely relative to one another in the orthogonal direction.
A micromachined device, comprising:
- a movable element;
- a first flexural device and a second flexural device located on opposite sides of the movable element and permitting movement of the movable element in a direction of travel, each of the flexural devices including an elongate floating beam substantially parallel to the direction of travel;
- and
- a constraining element extending between the floating beams, the constraining element having a low compliance in the direction of travel and a high compliance in a direction orthogonal to the direction of travel.
Dependencies are inferred from the claim text.