Micromechanical component and corresponing production method
AssigneeRobert Bosch GmbH
InventorsHubert Benzel, Heribert Weber, Hans Artmann, Frank Schaefer
Life of this patent
Estimating the term…
Abstract
A micromechanical component having a substrate (10) made from a substrate material having a first doping type (p), a micromechanical functional structure provided in the substrate (10) and a cover layer to at least partially cover the micromechanical functional structure. The micromechanical functional structure has zones (15; 15a; 15b; 15c; 730; 740; 830) made from the substrate material having a second doping type (n), the zones being at least partially surrounded by a cavity (50; 50e-f), and the cover layer has a porous layer (30) made from the substrate material.
Claims24
A micromechanical component comprising:
- a substrate (10) made from a substrate material having a first doping type (p);
- a micromechanical functional structure provided in the substrate (10);
- and
- a cover layer to at least partially cover the micromechanical functional structure;
- wherein the micromechanical functional structure has zones (15;
- 15a;
- 15b;
- 15c;
- 730;
- 740;
- 830) made from the substrate material having a-second doping type (n), the zones being at least partially surrounded by a cavity (50;
- 50a-f);
- and the cover layer has a porous layer (30) made from the substrate material.
The micromechanical component according to one of the preceding claims, wherein at least one of the zones (15;
- 15a;
- 15b;
- 15c;
- 730;
- 740;
- 830) made from the substrate material having the second doping type (n) is completely detached from its surroundings or is resiliently connected to the substrate.
The micromechanical component according to one of the preceding claims, wherein the cavity (50a-f) includes a flow channel which may be connected by at least two back openings (E, A1, A2;
- 510;
- 610;
- 710;
- 810).
The micromechanical component according to one of the preceding claims, wherein the cavity (50a-f) includes a circular inner flow channel (50e) and a concentric outer flow channel (50f), which are connected by radial ports (905) in a separation zone (15) made from the substrate material having the second doping type (n), the inner flow channel (50e) being interrupted by a bar (910), and a back inlet opening (E) being provided on one side of the bar (910), and a first back outlet opening (A1) being provided on the other side of the bar (910), and a second back outlet opening (A2) being provided in the outer flow channel (50f) so that a medium flowing through the back inlet opening (E) may be separated specific to mass by centrifugal force through the first and second back outlet opening (A1;
- A2).
The micromechanical component according to one of the preceding claims, wherein the substrate (10) has at least one trench (80) which is partially filled with a doping material of the second doping type (n) and partially filled with a filler (100).
The micromechanical component according to one of the preceding claims, wherein the substrate material is silicon.
The micromechanical component according to one of the preceding claims, wherein the zones (15;
- 15a;
- 15b;
- 15c;
- 730;
- 740;
- 830) made from the substrate material having the second doping type (n) are provided in the substrate (10) at different depths.
A method of manufacturing a micromechanical component having the steps:
- preparation of a substrate (1) from a substrate material having a first doping type (p);
- provision of a micromechanical functional structure in the substrate (10);
- and
- provision of a cover layer to at least partially cover the micromechanical functional structure;
- characterized by the steps
- provision of zones (15;
- 15a;
- 15b;
- 15c;
- 730;
- 740;
- 830) made from the substrate material having a second doping type (n) in the micromechanical functional structure;
- formation of a mask (20;
- 200) for the micromechanical functional structure;
- and
- anodic etching of the micromechanical functional structure having the zones (15;
- 15a;
- 15b;
- 15c;
- 730;
- 740;
- 830) using the mask so that the zones (15;
- 15a;
- 15b;
- 15c;
- 730;
- 740;
- 830) are at least partially surrounded by a cavity (50;
- 50a-f) and the cover layer is formed from the substrate material as a porous layer (30).
Dependencies are inferred from the claim text.