Analyzer/observer
AssigneeHitachi, Ltd.
InventorsHironaru Yamaguchi, Hidefumi Ibe, Naoki Yamagami
Life of this patent
Estimating the term…
Abstract
On a sample base 1 disposed within a vacuum container is provided a scale S(1) . . . S(N), where in an actual distance of the sample base is monitored by observing the scale trough an optical system for exclusive use thereof, which can catch it within a field of view. With this, it is possible to position a foreign body, as a target of analysis, which is analyzed or observed by a first analysis/observation device, so that it necessarily falls within a field of view of a second analysis/observation device, thereby realizing quick and automatic delivery of the samples when observing the foreign body on the sample by plural numbers of the devices.
Claims11
An analysis and observation apparatus, having analysis/observation means for conducting analysis or observation on a sample in plural numbers thereof, for performing analysis or observation on said sample through said plural numbers of analysis/observation means, comprising:
- a transfer means for moving the sample between said plural numbers of analysis/observation means;
- and
- a positioning means for positioning a specific position on said sample where a first analysis/observation means makes analysis or observation thereupon within afield of view of a second analysis/observation means, wherein
- said transfer means comprises a stage for use of movement in X-axis direction for holding and moving said sample in a predetermined direction (hereinafter, called by “X-axis direction”) and a stage support portion for movably supporting said stage for use of movement in X-axis direction,
- said stage for use of movement in X-axis direction comprises a scale marked with divisions at a constant distance along with said X-axis direction, and
- said positioning means comprises an optical system for scale observation, being fixed on a side of said stage support portion, whereby control on positioning of said transfer means is conducted by using a result observed by said optical system for scale observation.
A control method for positioning a sample as a target of analysis and observation, in an analysis and observation apparatus, comprising plural numbers of analysis/observation means therein, when moving the sample from a first analysis/observation means to a second analysis/observation means, comprising the following steps:
- providing a scale made up with divisions formed at a constant distance on a stage, holding said sample thereon and moving, along with a direction of movement, detecting the divisions of said scale provided on said stage, passing by a predetermined fixed position, and positioning a specific position on said sample, upon which said first analysis/observation means made analysis or observation, within a field of view of said second analysis/observation means.
A sample movement apparatus, having a transfer means for moving a sample and a positioning means for conducting positioning of said transfer means, wherein
- said transfer means comprises a stage for moving said sample into a predetermined direction while holding said sample therewith, and a support portion for movably supporting said stage thereon, said stage comprises a scale, being made up with divisions formed at a constant distance along a direction of movement, and said positioning means comprises an optical system of scale observation for observing said scale fixed on a side of said stage support portion, where by control on the positioning of said transfer means is performed by using a result of observation by means of said optical system of scale observation.
Dependencies are inferred from the claim text.