Detector arrangement and detection method

A method for forming an image of an object to be observed, comprising:

• providing a plurality of detectors, each detector being a position sensitive detector and each detector being provided for integrating, in terms of time, a position-dependent intensity of a beam of charged particles impinging on a detection areas of the detector during exposure times of the detector, and for supplying an image of the integrated position-dependent intensity, each detector having a dead time state during at least a part of a time required for supplying a respective image, during which dead time a respective detector does not integrate the intensity;
• providing a memory for receiving a plurality of images supplied by the detectors;
• imaging at least a partial region of the object on a detection area of a currently selected one of the plurality of detectors using the beam of charged particles and integrating the position-dependent intensity of the beam of charged particle using the currently selected detector;
• determining a detector of the plurality of detectors to be a newly selected detector which is different from the currently selected detector;
• transmitting a first image from the previously selected detector to a memory area of the memory after the exposure time of the previously selected detector has elapsed;
• imaging the at least a partial region of the object on a detection area of the newly selected detector using the beam of charged particles and integrating the position-dependent intensity of the beam of charged particles using the newly selected detector, the imaging and integrating associated with the newly selected detector both occurring during the transmission of the image from the previously selected detector to the memory area of the memory;
• and
• after termination of the exposure time of the newly selected detector, transmitting a second image from the newly selected detector to another memory area of the memory which is different from the memory area to which the first image from the previously selected detector is transmitted.

An apparatus for detecting image information associated with a beam of charged particles, comprising:

• a plurality of area sensors for providing image signals in response to the beam of charged particles;
• a deflector configured to sequentially direct the beam of charged particles at selected ones of the area sensors;
• and
• a control system configured to control the deflector to sequentially direct the beam of charged particles from a first area sensor to a second area sensor.