Radiation detector and method of manufacture thereof

A radiation detector manufacturing method comprising the steps of:

• fixing a solid-state imaging element having a light-receiving portion where a plurality of photoelectric conversion elements are arranged and having electrode pads electrically connected to the photoelectric conversion elements to a support surface of a substrate having external connection electrodes and electrode pads electrically connected to the external connection electrodes so as to make corresponding electrode pads face each other;
• electrically connecting the corresponding electrode pads by wiring lines;
• covering at least the wiring lines and the electrode pads with an electrical insulating covering member;
• forming a scintillator on the light-receiving portion of the solid-state imaging element;
• tightly sealing the covering member and the scintillator with an electrical insulating organic film;
• forming a metal thin film which covers a portion of the organic film on the scintillator;
• and
• exposing the external connection electrodes.

A radiation detector manufacturing method comprising the steps of:

• fixing a solid-state imaging element having a light-receiving portion where a plurality of photoelectric conversion elements are arranged and having electrode pads electrically connected to the photoelectric conversion elements to a support surface of a substrate having external connection electrodes and electrode pads electrically connected to the external connection electrodes so as to make corresponding electrode pads face each other;
• electrically connecting the corresponding electrode pads by wiring lines;
• forming a scintillator on the light-receiving portion of the solid-state imaging element;
• forming an electrical insulating organic film which covers the electrode pads, the wiring lines, and the scintillator, thereby tightly sealing the scintillator;
• forming a metal thin film which covers a portion of the organic film on the scintillator;
• and
• exposing the external connection electrodes.