Radiation detector and method of manufacture thereof
AssigneeHamamatsu Photonics K.K.
InventorsTakuya Homme, Kazuhisa Miyaguchi, Toshio Takabayashi
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Abstract
A solid-state imaging element 2 having a light-receiving portion where a plurality of photoelectric conversion elements 21 are arranged, and electrode pads 22 electrically connected to the photoelectric conversion elements 21 is mounted on a substrate 1. A scintillator 3 is formed on the surface of the light-receiving portion of the solid-state imaging element. Around a support surface 10 where the solid-state imaging element 2 of the substrate 1 is mounted, holding portions 14 and 15 are formed on opposing side walls to hold and project the surface of the light-receiving portion from a vapor deposition holder toward a vapor deposition chamber in forming the scintillator 3.
Claims4
A radiation detector comprising:
- a solid-state imaging element where a plurality of photoelectric conversion elements are arranged;
- a scintillator formed on a surface of a light-receiving portion of said solid-state imaging element by vapor deposition;
- and
- a substrate having a support surface where said solid-state imaging element is mounted, said substrate having holding portions which project laterally from at least two opposing side surfaces of said mounted solid-state imaging element to hold and project the surface of the light-receiving portion of said solid-state imaging element from a vapor deposition holder into a vapor deposition chamber in forming said scintillator.
A radiation detector manufacturing method comprising the steps of:
- mounting and fixing a solid-state imaging element, where a plurality of photoelectric conversion elements are arranged, on a support surface of a substrate;
- holding with holding portions of the substrate, which project laterally from at least two opposing side surfaces of the solid-state imaging element, to project a surface of a light-receiving portion of the solid-state imaging element from a vapor deposition holder into a vapor deposition chamber;
- and
- forming a scintillator by vapor deposition on the projecting surface of the light-receiving surface.
Dependencies are inferred from the claim text.