Method for increasing the measurement information available from a transmission electron microscope and a transmission electron microscopy device
AssigneeNanofactory Instruments AB
InventorHakan Olin
Life of this patent
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Abstract
This invention relates to a method for increasing the measurement information available from a transmission electron microscope, said information relating to a measurement sample, comprising the step of: including, in said transmission electron microscope, an atomic force microscopy device. This invention also relates to a transmission electron microscopy device, characterised in that a transmission electron microscope is combined with an atomic force microscope, positioned within said transmission electron microscope. Finally, the invention relates to a device for insertion in a transmission electron microscope, characterised in that said device comprises an atomic force microscopy device.
Claims15
Method for increasing the measurement information available from a transmission electron microscope, said information relating to a measurement sample, comprising the step of:
- including, in said transmission electron microscope, an atomic force microscopy device (4),
- visualising a sample (11) and a probe (18), being a part of said atomic force microscopy device (4), using the transmission electron microscope (1, 2, 3, 5, 6, 7), and
- simultaneously investigating a force interaction between said sample (11) and said probe (18) using the atomic force microscopy device (4) being arranged within said transmission electron microscope.
Transmission electron microscopy device, characterised in that the device comprises an atomic force microscopy device (4) being positioned within a transmission electron microscope, said transmission electron microscopy device further comprising a sample holder (10) for placing a sample (11) thereon, a cantilever (13) and a probe (18), being placed on the cantilever (13), forming part of said atomic force microscopy device (4) and being positioned close to the sample (11), and a cantilever deflection measurement device (15, 16, 17), wherein the atomic force microscopy device (4) and the transmission electron microscope are arranged to be simultaneously used.
Dependencies are inferred from the claim text.