Gas injector adapted for ALD process
AssigneeJusung Engineering Co., Ltd.
InventorsChul Ju Hwang, Jong Man Park
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Abstract
A gas injector includes a body, a motor and a chopper. The body is mounted on a reaction chamber in a vertically extending cylinder shape and has a plurality of gas injection tubes and a central hollow portion. The plurality of gas injection tubes pass through a bottom face of the body and the central hollow portion passes through each center of the bottom and top faces of the body. The motor has a rotary shaft inserted into the central hollow portion. The chopper is formed in a circular-plate shape and has a notch on a predetermined portion. The chopper is coupled with an end of the rotary shaft and rotated by a rotation of the rotary shaft in a state that the bottom face of the body is closely attached to the chopper through a magnetic sealing.
Claims4
A gas injector comprising:
- a body mounted on a reaction chamber in a vertically extending cylinder shape, and having a plurality of gas injection tubes penetrating bottom face thereof and a central tube penetrating each center of the bottom and top faces of the body;
- a motor having a rotary shaft inserted into the central tube;
- and
- a circular-plate shaped chopper connected to an end of the rotary shaft and having a predetermined cut portion, the chopper being magnetically sealed with the bottom face of the body and rotating by the rotation of the rotary shaft in a sealed state.
Dependencies are inferred from the claim text.