Method of metal etching post cleaning

Abstract

A method of metal etching post cleaning. A substrate with a surface covered by a patterned metal layer and a patterned resist layer in order is provided, subsequently, oxygen-plasma ashing is performed to remove the patterned resist layer to expose the surface of the patterned metal layer. Next, an ozone-plasma ashing is performed to release charges on the surface of the patterned metal layer, the ozone-plasma ashing time at 30 sec˜180 sec, and the ozone-plasma ashing temperature at 200° C.˜300° C. The surface of the patterned metal layer is finally cleaned with sulfuric peroxide, molar concentration of sulfuric acid and hydrogen peroxide therein being 0.07M˜0.4M and 0.8M˜1.5M, respectively. In addition, the temperature of the sulfuric peroxide during post cleaning is 25° C.˜50° C.

Dependencies are inferred from the claim text.