Adjustable throw reactor
AssigneeApplied Materials, Inc.
InventorsMarc O. Schweitzer, Dinesh Saigal, Alan Liu
Life of this patent
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Abstract
Embodiments of the invention provide a processing apparatus having a lower reactor portion, an adjustable reactor wall portion attached to an upper portion of the lower reactor portion, the adjustable reactor wall portion being configured for selective linear expansion and contraction, and a source assembly positioned above the adjustable reactor wall portion. The cooperative operation of the source, adjustable wall, and the lower reactor creates a processing apparatus wherein the throw distance may be varied without disassembly of the reactor.
Claims22
A processing apparatus, comprising:
- a lower reactor portion;
- an adjustable reactor wall portion attached to an upper portion of the lower reactor portion, the adjustable reactor wall portion being configured for selective linear expansion and contraction;
- and
- a source assembly positioned above the adjustable reactor wall portion.
An improved self ionizing plasma reactor, comprising:
- a reactor body portion having a generally annular wall and a base member;
- a selectively adjustable upper reactor wall positioned above the reactor body;
- a device for adjusting the selectively adjustable upper reactor wall, the device for adjusting being in communication with the selectively adjustable upper reactor wall;
- and
- a source assembly positioned above the selectively adjustable upper reactor wall.
A plasma reactor, comprising:
- a lower reactor portion having a substrate support member positioned therein;
- an adjustable reactor wall portion positioned above the lower reactor portion;
- a source assembly positioned above the adjustable reactor wall portion;
- and
- a device for actuating the adjustable reactor wall portion, the device for actuating being in communication with the lower reactor portion and the source assembly.
Dependencies are inferred from the claim text.