Apparatus for cleaning residual material from an article
AssigneeInternational Business Machines Corporation
InventorsRaschid Jose Bezama, John F. Harmuth, Jason Scott Miller, Randall Jason Werner
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AssigneeInternational Business Machines Corporation
InventorsRaschid Jose Bezama, John F. Harmuth, Jason Scott Miller, Randall Jason Werner
Estimating the term…
An apparatus in which opposed nozzle assemblies are utilized to clean residual material, such as a metallic paste, from an article, such as a screening mask. Each of the nozzle assemblies has a first set of nozzles for spraying a cleaning agent onto the article in a first pattern to first chemically and mechanically remove residual material from the article. At least one of the nozzle assemblies has a second set of nozzles for spraying a cleaning agent onto the article in a second pattern while simultaneously applying a voltage between the second set of nozzles and the article to then chemically and electrolytically remove the remaining residual material from the article.
An apparatus for cleaning residual material from an article comprising:
An apparatus for cleaning residual material from an article comprising:
Dependencies are inferred from the claim text.