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US 2003/0116280 A1Published application
Apparatus and method for insulating a seal in a process chamber
OwnerDavid Robinson, Michael Draperinventors
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OwnerDavid Robinson, Michael Draperinventors
Estimating the term…
An apparatus and method are provided for insulating a seal (110) made of a polymeric material in a pressurized, evacuated or exhausted process chamber (100) that reduces damage due to heat transferred to the seal from the chamber. The chamber (100) includes a wall (125) having an aperture (140) therein, a flange (115) disposed about the aperture, and an insulator (105) between the flange and a fixture (120) to insulate the seal between the flange and the fixture. Generally, the insulator (105) includes a cooling tube or loop (260) having a sidewall (262) overlying and attached to the flange (115), and a cap (255) overlying the loop. The cap (255) has a sealing surface (257) against which the seal (110) seats. Fluid may be passed through the loop (260) to reduce heat transferred to the seal (110). Preferably, the flange (115), the loop (260), and the cap (255), are made of quartz or a glass, and the sidewall (262) of the loop is welded to the flange and the cap. More preferably, the loop (260) functions as a light pipe to direct heat radiating from the chamber (100) away from the seal (110).
A process chamber comprising:
A method of insulating a seal between a glass process chamber and a fixture, the process chamber having a wall with an aperture therein, and a glass flange disposed about the aperture, the method comprising steps of:
An insulator for insulating a seal between a process chamber and a fixture, the process chamber having a wall with an aperture therein, and a glass flange disposed about the aperture, the insulator comprising:
Dependencies are inferred from the claim text.