Sample separating apparatus and method, and substrate manufacturing method

A separating method of separating a plate-like sample having a separation layer at the separation layer, comprising the steps of:

• holding the plate-like sample by a holding mechanism in a substantially horizontal state;
• ejecting a fluid from an election portion to the separation layer of the plate-like sample while rotating the plate-like sample held by said holding mechanism to separate the plate-like sample at the separation layer using the fluid;
• and
• removing separated plate-like samples from said holding mechanism.

A separating method of separating a plate-like sample having a separation layer at the separation layer, comprising the steps of:

• pressing and holding the plate-like sample by a holding mechanism in a substantially horizontal state;
• ejecting a fluid from an election portion to the separation layer of the plate-like sample held by said holding mechanism to separate the plate-like sample at the separation layer using the fluid;
• and
• removing separated plate-like samples from said holding mechanism.

A method of manufacturing a substrate, comprising:

• the preparation step of bonding a first substrate having a fragile layer to a second substrate to prepare a bonded substrate stack;
• the separation step of separating the bonded substrate stack at the fragile layer using a fluid;
• and
• the removal step of removing the fragile layer remaining on the second substrate after the separation step,
• wherein the separation step comprises ejecting the fluid to the fragile layer of the bonded substrate stack while holding and rotating the bonded substrate stack in a substantially horizontal state to separate the bonded substrate stack at the fragile layer using the fluid.

A method of manufacturing a substrate, comprising:

• the preparation step of bonding a first substrate having a fragile layer to a second substrate to prepare a bonded substrate stack;
• the separation step of separating the bonded substrate stack at the fragile layer using a fluid;
• and
• the removal step of removing the fragile layer remaining on the second substrate after the separation step,
• wherein the separation step comprises ejecting the fluid to the fragile layer of the bonded substrate stack while pressing and holding the bonded substrate stack in a substantially horizontal state to separate the bonded substrate stack at the fragile layer using the fluid.

A separating apparatus for separating a plate-like sample having a separation layer at the separation layer, comprising:

• a holding mechanism for holding the plate-like sample;
• an ejection portion for ejecting a fluid to the plate-like sample held by said holding mechanism to separate the plate-like sample at the separation layer using the fluid;
• and
• an abrupt operation prevention mechanism for preventing said holding mechanism from abruptly moving due to a force of the fluid acting in the plate-like sample while allowing said holding mechanism to moderately move when separating the plate-like sample.

A method of manufacturing a substrate, comprising:

• the preparation step of bonding a first substrate having a fragile layer to a second substrate to prepare a bonded substrate stack;
• the separation step of separating the bonded substrate stack at the fragile layer using a fluid;
• and
• the removal step of removing the fragile layer remaining on the second substrate after the separation step,
• wherein the separation step comprises separating the bonded substrate stack at the fragile layer while preventing the bonded substrate stack from abruptly warping due to a force of the fluid acting in the bonded substrate stack and allowing the bonded substrate stack to moderately warp.