Process for electrolytically cleaning paste from a workpiece
AssigneeInternational Business Machines Corporation
InventorsJames N, Humenik, Tuyen Hong Nguyen, George R. Proto, Demian M. Riccardi, Krishna G. Sachdev, Krystyna W. Semkow
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Abstract
A process for cleaning paste from a workpiece, such as a screening mask, which includes the step of electrolytically contacting the workpiece with an aqueous solution containing 0.2 to 2 weight percent TMAH. As an optional prestep, the workpiece may be cleaned nonelectrolytically with an aqueous solution containing 0.2 to 2 weight percent TMAH.
Claims16
A process for cleaning paste residue from a workpiece comprising the step of electrolytically contacting the workpiece with an aqueous solution containing 0.2 to 2 weight percent TMAH.
Dependencies are inferred from the claim text.