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US 2003/0115968 A1Published application
Capacitive microsystem for recording mechanical deformations, use and operating method
AssigneeSiemens Aktiengesellschaft
InventorsGuenter Doemens, Dieter Spriegel, Hans Wuensche
Life of this patent
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Abstract
The invention relates to a capacitive microsystem, which can be used to replace conventional strain gauges used currently. The microsystem has substantial advantages with regard to handling, overload stability and endurance. Capacitive microsystems of this type can be used to record deformations and to calculate forces, torque etc. They can be used in particular to determine the weight of vehicle seats, to provide for example deployment data for an airbag.
Claims11
A capacitive microsystem for recording mechanical deformations comprising:
- at least two flat electrodes set at acute angles with respect to each other, said electrodes comprising a measuring electrode and a counter electrode, wherein measuring signals result from changes in the capacitance when there is a corresponding change in the setting angle formed between the electrodes;
- an elongate bending element having a support in the form of a beam and end regions connected to said support via bending regions;
- at least one counter electrode rigidly connected to one end region of the bending element, said counter electrode interacts with the measuring electrode positioned on the support, wherein both the measuring electrode and a reference capacitor having been applied in a planar manner along with an electronic component to a glass substrate fastened on the support, and both measurement data and an energy supply being available via connections.
Dependencies are inferred from the claim text.