Thin pressure sensor and biological information measuring device using same, and biological information measuring method
AssigneeNational Institute of Advanced Industrial Science and Technology
InventorsNaohiro Ueno, Morito Akiyama, Kiichi Ikeda, Hiroshi Tateyama
Life of this patent
Estimating the term…
Abstract
A thin pressure sensor includes: a pair of external electrodes, which are respectively made of conductive thin films that are respectively provided with piezoelectric layers on inner sides; and a single internal electrode, made of a conductive thin film, which is sealed between the pair of external electrodes, one of the pair of external electrodes having a conducting window that conducts to said internal electrode. The thin pressure sensor has a simple and thin structure with sufficient durability and mechanical strength.
Claims19
A thin pressure sensor comprising:
- a pair of external electrodes, which are respectively made of conductive thin films that are respectively provided with piezoelectric layers on inner sides;
- and
- a single internal electrode, made of a conductive thin film, which is sealed between said pair of external electrodes,
- one of said pair of external electrodes having a conducting window that conducts to said internal electrode.
A biological information measuring device for measuring a pressure change of a living body, comprising:
- a thin pressure sensor, which includes:
- a pair of external electrodes, which are respectively made of conductive thin films that are respectively provided with piezoelectric layers on inner sides;
- and
- a single internal electrode, made of a conductive thin film, which is sealed between said pair of external electrodes,
- one of said pair of external electrodes having a conducting window that conducts to said internal electrode.
A biological information measuring method, comprising the step of measuring a pressure change of a living body using a thin pressure sensor,
- the thin pressure sensor including:
- a pair of external electrodes, which are respectively made of conductive thin films that are respectively provided with piezoelectric layers on inner sides;
- and
- a single internal electrode, made of a conductive thin film, which is sealed between said pair of external electrodes,
- one of said pair of external electrodes having a conducting window that conducts to said internal electrode.
Dependencies are inferred from the claim text.