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US 2003/0114006 A1Published application
Integrated circuit waveguide
AssigneeApplied Materials, Inc.
InventorJohn M. White
Life of this patent
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AssigneeApplied Materials, Inc.
InventorJohn M. White
Estimating the term…
A method for forming an optical waveguide includes depositing a cladding material on a first substrate, forming a trench in the cladding material on the first substrate, and filling the trench with a optically conductive core material. The upper surface of the cladding material and the optically conductive core material are then planarized to produce a substantially planar surface. The method further includes depositing a cladding material on a second substrate, forming a mirror image trench into the cladding material on the second substrate, and filling the mirror image trench with the optically conductive core material. The upper surface of the second cladding layer and the core material therein is then planarized. Thereafter, the first substrate is affixed to the second substrate such that the trench and the mirror image trench are in abutment and form a substantially circular optical core.
A method for forming an optical waveguide, comprising:
A method for forming a substantially circular optical channel in a waveguide, comprising:
An optical waveguide, comprising:
Dependencies are inferred from the claim text.