Method for manufacturing multi-layer package substrates
AssigneeVIA Technologies, Inc.
InventorsMoriss Kung, Kwun-Yao Ho
Life of this patent
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AssigneeVIA Technologies, Inc.
InventorsMoriss Kung, Kwun-Yao Ho
Estimating the term…
A method for manufacturing multi-layer package substrates is shown. A substrate with a first side and a second side is first provided, and a layer of release film is formed on the first side and second side of the substrate. After drilling a plurality of through holes on the substrate bonded to the release film and plugging the through holes with a conductive material, the release film is removed. A first copper film is formed on the first and second side of the substrate. First, circuit layer patterns are formed on the first and second side of the substrate through photolithography and etching processes. After coating an build-up layer on the first and second side of the substrate and drilling the build-up layers with a laser to form counter vias on the first side and second side of the substrate, a copper seed layer is formed on the inner surfaces of the counter vias. Second circuit layer patterns are formed on the first side and second side of the substrate. Finally, contact pads are formed on the first side and second side of the substrate.
A method for manufacturing multi-layer package substrates, comprising the steps of:
Dependencies are inferred from the claim text.