Photosensitive ploysilazane composition, method of forming pattern therefrom, and method of burning coating film thereof

A method of burning a radiation sensitive polysilazane coating film, wherein the steps of exposing with light and moistening the radiation sensitive polysilazane coating film are provided as pretreatment steps for burning.

A radiation sensitive polysilazane composition comprising a modified poly(sil sesquiazane) having a number average molecular weight of 100 to 100,000 and containing a basic constituent unit represented by the general formula:

• —[SiR6(NR7)1.5]— and other constituent units represented by the general formula:
• —[SiR62NR7]— and/or —[SiR63(NR7)0.5]— (in the aforementioned formulae, R6 independently represents a C1-3 alkyl group or a substituted or unsubstituted phenyl group and R7 independently represents a hydrogen atom, a C1-3 alkyl group or a substituted or unsubstituted phenyl group) in a ratio of 0.1 to 100 mol-% to said basic constituent unit, a photo acid generator, and a water-soluble compound as a shape stabilizer.

A method of forming a patterned inter-layer dielectric, which comprises forming a coating film of a radiation sensitive polysilazane composition comprising a modified poly(sil sesquiazane) having a number average molecular weight of 100 to 100,000 and containing a basic constituent unit represented by the general formula:

• —[SiR6(NR7)1.5]— and other constituent units represented by the general formula:
• —[SiR62NR7]— and/or —[SiR63(NR7)0.5]— (in the aforementioned formulae, R6 independently represents a C1-3 alkyl group or a substituted or unsubstituted phenyl group and R7 independently represents a hydrogen atom, a C1-3 alkyl group or a substituted or unsubstituted phenyl group) in a ratio of 0.1 to 100 mol-% to said basic constituent unit, a photo acid generator, and a water-soluble compound as a shape stabilizer, patternwise irradiating the coating film, dissolving and removing the irradiated part of the coating film, and leaving the residual patterned coating film in the ambient atmosphere or burning the coating film.