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US 2003/0113553 A1Published application
Silicon based substrate with a CTE compatible layer on the substrate
AssigneeUnited Technologies Corporation
InventorsEllen Y. Sun, Harry E. Eaton
Life of this patent
Estimating the term…
Abstract
An article comprising a substrate containing silicon and at least one layer which contains a coefficient of thermal expansion (CTE) tailoring additive in an amount sufficient to maintain a compatible CTE with at least one adjacent layer and the substrate.
Claims22
An article comprising:
- a substrate comprising silicon;
- and
- at least one layer, wherein the least one layer contains a coefficient of thermal expansion (CTE) tailoring additive in an amount sufficient to maintain a compatible CTE with the substrate.
Dependencies are inferred from the claim text.