Method for preparing and regenerating a composite crucible
AssigneeMitsubishi Material Quartz Corporation
InventorsYoshiyuki Tsuji, Masanori Fukui, Ken-Ichi Hiroshima
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Abstract
A composite crucible for pulling up monocrystalline silicone, which is superior in shape stability and suitable for a large-sized one is provided. The composite crucible is characterized in that a carbonaceous material as an outer layer and a quartz glass as an inner layer are integrally formed.
Claims9
A composite crucible for pulling up monocrystalline silicone, comprising an inner layer made of quartz glass, and an outer layer made of a carbonaceous material, wherein the carbonaceous material of the outer layer and the quartz glass of the inner layer are integrally formed.
A method for preparing a composite crucible for pulling up monocrystalline silicone, which crucible having an inner quartz layer and an outer carbonaceous material layer, the method comprising:
- using a carbon fiber crucible as an outer circumferential part,
- supplying quartz powders on an inner surface of the carbon crucible while rotating it to be heated and melted;
- and
- vitrifying the quartz layer up to the inner surface of the carbon crucible to integrally form the quartz glass layer and the carbon crucible layer, thereby obtaining the composite crucible having a carbon fiber outer layer integrally formed with a quartz glass inner layer.
A method for regenerating a composite crucible, comprising:
- heating the crucible from the inner surface side;
- and fusing again the surface of the quartz glass layer.
A method for regenerating a composite crucible, comprising:
- removing a quartz glass layer of the composite crucible;
- supplying fresh quartz powders on an inner surface of the remaining carbon crucible to be heated and melted;
- and
- vitrifying the quartz powder to thereby integrally form the quartz glass layer and carbon crucible layer.
Dependencies are inferred from the claim text.