Dual robot processing system

A substrate processing system comprising:

• a transfer chamber comprising:
• a body;
• a first transfer area defined within the body;
• a second transfer area defined within the body and separated from the first transfer area by a center axis of the body;
• a first passage coupling a first side of the body and the first transfer area;
• a second passage coupling the first side of the body and the second transfer area;
• a transfer platform disposed between the first transfer area and the second transfer area, the transfer platform comprising:
• a rotatable support surface adapted to support a substrate;
• a support member having the support surface disposed thereon;
• a first load lock chamber fluidly coupled to the first passage;
• a second load lock chamber fluidly coupled to the second passage;
• a first processing chamber coupled to the transfer chamber;
• a second processing chamber coupled to the transfer chamber on a side of the center axis opposite the first processing chamber;
• a first transfer robot disposed in the first transfer area and adapted to transfer substrates between the first load lock, the transfer platform and the first processing chamber;
• and
• a second transfer robot disposed in the second transfer area and adapted to transfer substrates between the second load lock, the transfer platform and the second processing chamber.

A substrate processing system comprising:

• a transfer chamber comprising:
• a body;
• a first transfer area defined within the body;
• a second transfer area defined within the body and separated from the first transfer area by a center axis of the body;
• a first passage coupling a first side of the body and the first transfer area;
• a second passage coupling the first side of the body and the second transfer area;
• a transfer platform disposed between the first transfer area and the second transfer area, the transfer platform comprising:
• a rotatable support surface adapted to support a substrate;
• a plurality of lift pins;
• a lift plate selectively contacting the lift pins;
• a support member having the support surface disposed thereon;
• and;
• a lift mechanism coupled to the support member or lift plate actuatable between a first position and a second position that moves the lift pins relative to the support surface;
• a first load lock chamber fluidly coupled to the first passage;
• a second load lock chamber fluidly coupled to the second passage;
• a first processing chamber coupled to the transfer chamber;
• a second processing chamber coupled to the transfer chamber on a side of the center axis opposite the first processing chamber;
• a first transfer robot disposed in the first transfer area and adapted to transfer substrates between the first load lock, the transfer platform and the first processing chamber;
• and
• a second transfer robot disposed in the second transfer area and adapted to transfer substrates between the second load lock, the transfer platform and the second processing chamber.

A substrate processing system comprising:

• a transfer chamber comprising:
• a body;
• a first transfer area defined within the body;
• a second transfer area defined within the body and separated from the first transfer area by a center axis of the body;
• a first passage coupling a first side of the body and the first transfer area;
• a second passage coupling the first side of the body and the second transfer area, the first passage and the second passage forming an acute angle about the center axis;
• a transfer platform disposed on the center axis between the first transfer area and the second transfer area;
• a first load lock chamber fluidly coupled to the first passage;
• a second load lock chamber fluidly coupled to the second passage;
• a first processing chamber coupled to the transfer chamber;
• a second processing chamber coupled to the transfer chamber on a side of the center axis opposite the first processing chamber;
• a first transfer robot disposed in the first transfer area and adapted to transfer substrates between the first load lock, the transfer platform and the first processing chamber;
• and
• a second transfer robot disposed in the second transfer area and adapted to transfer substrates between the second load lock, the transfer platform and the second processing chamber, the second transfer robot and the first transfer robot aligned along a line perpendicular to the center axis.

A substrate processing system comprising:

• a transfer chamber comprising:
• a body;
• a first transfer area defined within the body;
• a second transfer area defined within the body and separated from the first transfer area by a center axis of the body;
• a first passage coupling a first side of the body and the first transfer area;
• a second passage coupling the first side of the body and the second transfer area, the first passage and the second passage forming an acute angle about the center axis;
• a transfer platform disposed between the first transfer area and the second transfer area, the transfer platform comprising:
• a rotatable support surface adapted to support a substrate;
• a plurality of lift pins;
• a lift plate selectively contacting the lift pins;
• a support member having the support surface disposed thereon;
• and;
• a lift mechanism coupled to the support member or lift plate actuatable between a first position and a second position that moves the lift pins relative to the support surface;
• a first load lock chamber fluidly coupled to the first passage;
• a second load lock chamber fluidly coupled to the second passage;
• a first processing chamber coupled to the transfer chamber;
• a second processing chamber coupled to the transfer chamber on a side of the center axis opposite the first processing chamber;
• a first transfer robot disposed in the first transfer area and adapted to transfer substrates between the first load lock, the transfer platform and the first processing chamber;
• and
• a second transfer robot disposed in the second transfer area and adapted to transfer substrates between the second load lock, the transfer platform and the second processing chamber, the second transfer robot and the first transfer robot aligned along a line perpendicular to the center axis.