Vacuum heat-treatment apparatus
AssigneeJH Corporation
InventorNoboru Hiramoto
Life of this patent
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Abstract
A vacuum heat-treatment apparatus for heat-treating a workpiece in a treating cell includes a hermetic chamber disposed at the center. A plurality of treating cells are disposed along the periphery of the hermetic chamber, and a workpiece transfer mechanism is disposed inside the hermetic chamber and transfers the workpiece from one of the treating cells to the hermetic chamber and from the hermetic chamber to one of the treating cells.
Claims5
A vacuum heat-treatment apparatus for heat-treating a workpiece in a treating cell comprising a hermetic chamber disposed at the center, a plurality of treating cells disposed along the periphery of the hermetic chamber, and a workpiece transfer mechanism which is disposed inside the hermetic chamber and transfers the workpiece from one of the treating cells to the hermetic chamber and from the hermetic chamber to one of the treating cells.
Dependencies are inferred from the claim text.