Inspection device for liquid crystal driving substrate

An inspection apparatus for liquid crystal drive substrates that discriminates defective pixels having an abnormal voltage and normal pixels having a normal voltage based on pixel voltage by arranging an electro-optical element plate of a size smaller than a liquid crystal drive substrate in opposition to said liquid crystal drive substrate on which pixel electrodes are arranged in the form of a matrix, acquiring a voltage image of the electro-optical element plates extending over the entire region of the liquid crystal drive substrate by sequentially moving the relative position for each small section so that each small section of the liquid crystal drive substrate is in planar opposition with the electro-optical element plate in the state in which a prescribed voltage is written to the pixel electrodes, and calculating the actual voltage of each pixel electrode in the form of a pixel voltage based on said voltage image and the electro-optical characteristics of the above electro-optical element plate,

• wherein the inspection apparatus comprises an image processing apparatus that classifies pixel electrodes of defect candidates for each defect type by comparing pixel voltage with a threshold value set for each defect type of defective pixel, and finally judges pixel electrodes of defect candidates for each said defect type as defective pixels of each defect type based on judgment conditions provided for each defect type, while also performing the above classification processing during movement between each of the above small sections.

An inspection apparatus for liquid crystal drive substrates that discriminates defective pixels having an abnormal voltage and normal pixels having a normal voltage based on pixel voltage by arranging an electro-optical element plate in opposition to a glass substrate on which a plurality of liquid crystal drive substrates are formed on which pixel electrodes are arranged in the form of a matrix, acquiring a voltage image of the electro-optical element plate for all liquid crystal drive substrates by sequentially moving the relative position for each liquid crystal drive substrate so that each liquid crystal drive substrate is in planar opposition with the electro-optical element plate in the state in which a prescribed voltage is written to each pixel electrode, and calculating the actual voltage of each pixel electrode in the form of a pixel voltage based on said voltage image and the electro-optical characteristics of the above electro-optical element plate,

• wherein the inspection apparatus comprises an image processing apparatus that classifies the pixel electrodes of defect candidates for each above defect type by comparing pixel voltage with a threshold value set for each defect type of defective pixel, and finally judges said pixel electrodes of defect candidates for each defect type as defective pixels of each defect type based on judgment conditions provided for each defect type, while also performing said judgment during movement between each liquid crystal drive substrate.

An inspection apparatus for liquid crystal drive substrates that discriminates defective pixels having an abnormal voltage and normal pixels having a normal voltage based on pixel voltage by arranging an electro-optical element plate of a size smaller than liquid crystal drive substrates in opposition to a glass substrate on which a plurality of said liquid crystal drive substrates are formed on which pixel electrodes are arranged in the form of a matrix, acquiring a voltage image of the electro-optical element plate for all liquid crystal drive substrates over the entire region of all liquid crystal drive substrates by sequentially moving the relative position for each liquid crystal drive substrate so that each liquid crystal drive substrate is in planar opposition with the electro-optical element plate, and by moving the relative position for each small section so that each small section of the liquid crystal drive substrates is in planar opposition with the electro-optical element plate, in the state in which a prescribed voltage is written to the pixel electrodes, and calculating the actual voltage of each pixel electrode in the form of a pixel voltage based on said voltage image and the electro-optical characteristics of the above electro-optical element plate,

• wherein the inspection apparatus comprises an image processing apparatus that classifies the pixel electrodes of defect candidates for each defect type by comparing pixel voltage with a threshold value set for each defect type of defective pixel, and finally judges said pixel electrodes of defect candidates for each defect type as defective pixels of each defect type based on judgment conditions provided for each defect type, while also processing said classification during movement for each of the above small sections, and processing said judgment during movement between each liquid crystal drive substrate.