Thin film magnetic head and method of manufacturing the same

A thin film magnetic head used for a magnetic recording/reproducing apparatus including a recording medium moving to a predetermined direction of movement, the thin film magnetic head comprising:

• a first and a second magnetic layers including pole portions facing each other in a recording-medium-facing surface facing the recording medium and its vicinity, and being magnetically coupled to each other in a position far from the recording-medium-facing surface;
• a gap layer being disposed between the pole portions facing each other;
• and
• a thin film coil being disposed between the first and the second magnetic layers in a state of being insulated from the first and the second magnetic layers,
• wherein the second magnetic layer includes a track width determining portion having an exposed surface exposed to the recording-medium-facing surface and determining a recording track width of the recording medium, and
• the track width determining portion includes a laminate of a first magnetic film extending from a predetermined position far from the recording-medium-facing surface to a direction away from the recording-medium-facing surface and a second magnetic film with an end surface corresponding to a film thickness in order from a medium-incoming side in the direction of movement, and the end surface constitutes the exposed surface.

A method of manufacturing a thin film magnetic head, the thin film magnetic head being used for a magnetic recording/reproducing apparatus including a recording medium moving to a predetermined direction of movement, and comprising a first and a second magnetic layers including pole portions facing each other in a recording-medium-facing surface facing the recording medium and its vicinity, and being magnetically coupled to each other in a position far from the recording-medium-facing surface, a gap layer being disposed between the pole portions facing each other, and a thin film coil being disposed between the first and the second magnetic layers in a state of being insulated from the first and the second magnetic layers,

• the method comprising the step of:
• forming the second magnetic layer so as to include a track width determining portion having an exposed surface exposed to the recording-medium-facing surface and determining a recording track width of the recording medium,
• wherein the exposed surface has a first edge positioned on a medium-outgoing side in the direction of movement and a second edge positioned on a medium-incoming side in the direction of movement, and
• a width of the first edge is larger than a width of the second edge, and is equal to or larger than a width of the exposed surface in any middle position between the first and the second edges.

A method of manufacturing a thin film magnetic head, the thin film magnetic head being used for a magnetic recording/reproducing apparatus including a recording medium moving to a predetermined direction of movement, and comprising a first and a second magnetic layers including pole portion facing each other in a recording-medium-facing surface facing the recording medium and its vicinity, and being magnetically coupled to each other in a position far from the recording-medium-facing surface, a gap layer being disposed between the pole portions facing each other, and a thin film coil being disposed between the first and the second magnetic layers in a state of being insulated from the first and the second magnetic layers,

• the method comprising the steps of:
• laminating two precursory magnetic films on the gap layer in order;
• and
• processing the two precursory magnetic films to form the recording-medium-facing surface, thereby forming the second magnetic layer so as to have a laminate including a first magnetic film having a first exposed surface exposed to the recording-medium-facing surface and a second magnetic film having a second exposed surface exposed to the recording-medium-facing surface in this order,
• wherein the second exposed surface has a first edge positioned on a medium-outgoing side in the direction of movement and a second edge positioned on a medium-incoming side in the direction of movement, and
• a width of the first edge is larger than a width of the second edge, and is equal to or larger than a width of the exposed surface in any middle position between the first and the second edges.

A method of manufacturing a thin film magnetic head, the thin film magnetic head being used for a magnetic recording/reproducing apparatus including a recording medium moving to a predetermined direction of movement, and comprising a first and a second magnetic layers including pole portions facing each other on a recording-medium-facing surface facing the recording medium and its vicinity, and being magnetically coupled to each other in a position far from the recording-medium-facing surface, a gap layer being disposed between the pole portions facing each other, and a thin film coil being disposed between the first and the second magnetic layers in a state of being insulated from the first and the second magnetic layers, the second magnetic layer including a track width determining portion having an exposed surface exposed to the recording-medium-facing surface and determining a recording track width of the recording medium,

• the method comprising the steps of:
• forming a first precursory magnetic layer pattern as a preparatory layer of the second magnetic layer on the gap layer;
• forming a non-magnetic layer pattern on the first precursory magnetic layer pattern;
• forming a second precursory magnetic layer pattern by use of the non-magnetic layer pattern as a mask through selectively dry etching the first precursory magnetic layer pattern, while an ion beam is applied from a direction forming an angle of 45° or over with a direction orthogonal to an extending surface of the first precursory magnetic layer pattern;
• and
• processing the second precursory magnetic layer pattern to form the recording-medium-facing surface, thereby forming the second magnetic layer so that the track width determining portion constitutes the exposed surface,
• wherein the exposed surface of the track width determining portion has a first edge positioned on a medium-outgoing side in the direction of movement and a second edge positioned on a medium-incoming side in the direction of movement, and
• a width of the first edge is larger than a width of the second edge, and is equal to or larger than a width of the exposed surface in any middle position between the first and the second edges.

A method of manufacturing a thin film magnetic head, the thin film magnetic head being used for a magnetic recording/reproducing apparatus including a recording medium moving to a predetermined direction of movement, and comprising a first and a second magnetic layers including pole portions facing each other on a recording-medium-facing surface facing the recording medium and its vicinity, and being magnetically coupled to each other in a position far from the recording-medium-facing surface, a gap layer being disposed between the pole portions facing each other, and a thin film coil being disposed between the first and the second magnetic layers in a state of being insulated from the first and the second magnetic layers, the second magnetic layer including a track width determining portion having an exposed surface exposed to the recording-medium-facing surface and determining a recording track width of the recording medium,

• the method comprising the steps of:
• forming a first precursory magnetic layer pattern as a preparatory layer of the second magnetic layer on the gap layer;
• forming a coating layer made of a predetermined non-magnetic material so as to coat surroundings of a portion of the first precursory magnetic layer pattern on a side far from the gap layer;
• forming a second precursory magnetic layer pattern through selectively dry etching the first precursory magnetic layer pattern by use of the coating layer as a mask, while an ion beam is applied from a direction forming a predetermined angle with a direction orthogonal to an extending surface of the first precursory magnetic layer pattern;
• and
• processing the second precursory magnetic layer pattern to form the recording-medium-facing surface, thereby forming the second magnetic layer so that the track width determining portion constitutes the exposed surface,
• wherein the exposed surface of the track width determining portion has a first edge positioned on a medium-outgoing side in the direction of movement and a second edge positioned on a medium-incoming side in the direction of movement, and
• a width of the first edge is larger than a width of the second edge, and is equal to or larger than a width of the exposed surface in any middle position between the first and the second edges.

A method of manufacturing a thin film magnetic head, the thin film magnetic head being used for a magnetic recording/reproducing apparatus including a recording medium moving to a predetermined direction of movement, and comprising a first and a second magnetic layers including pole portions facing each other on a recording-medium-facing surface facing the recording medium and its vicinity, and being magnetically coupled to each other in a position far from the recording-medium-facing surface, a gap layer being disposed between the pole portions facing each other, and a thin film coil being disposed between the first and the second magnetic layers in a state of being insulated from the first and the second magnetic layers, the second magnetic layer including a track width determining portion having an exposed surface exposed to the recording-medium-facing surface and determining a recording track width of the recording medium,

• the method comprising the steps of:
• forming a first precursory magnetic layer pattern as a preparatory layer of the second magnetic layer on the gap layer;
• forming a coating layer made of a predetermined non-magnetic material so as to coat surroundings of a portion of the first precursory magnetic layer pattern on a side far from the gap layer;
• selectively etching a portion of the first precursory magnetic layer pattern on a side near the gap layer by use of the coating layer as a mask through wet etching using a predetermined etchant to form a second precursory magnetic layer pattern;
• and
• processing the second precursory magnetic layer pattern to form the recording-medium-facing surface, thereby forming the second magnetic layer so that the track width determining portion constitutes the exposed surface,
• wherein the exposed surface of the track width determining portion has a first edge positioned on a medium-outgoing side in the direction of movement and a second edge positioned on a medium-incoming side in the direction of movement, and
• a width of the first edge is larger than a width of the second edge, and is equal to or larger than a width of the exposed surface in any middle position between the first and the second edges.

A thin film magnetic head, comprising:

• a first and a second magnetic layers including pole portions facing each other on a recording-medium-facing surface facing the recording medium and its vicinity, and being magnetically coupled to each other in a position far from the recording-medium-facing surface;
• a gap layer being disposed between the pole portions facing each other;
• and
• a thin film coil being disposed between the first and the second magnetic layers in a state of being insulated from the first and the second magnetic layers,
• wherein the second magnetic layer includes a coupling structure having:
• a first magnetic layer portion having an exposed surface exposed to the recording-medium-facing surface, being disposed so as to extend from the recording-medium-facing surface to a predetermined coupling position far from the recording-medium-facing surface, and determining a recording track width of the recording medium, and
• a second magnetic layer portion being magnetically coupled to the first magnetic layer portion in the coupling position, and extending in a direction away from the recording-medium-facing surface,
• the exposed surface of the first magnetic layer portion includes a first edge positioned on a side far from the gap layer, and a second edge positioned on a side near the gap layer, and
• a width of the first edge is larger than a width of the second edge, and is equal to or larger than a width of exposed surface in any middle position between the first and the second edges.

A thin film magnetic head, comprising:

• a first and a second magnetic layers including pole portions facing each other on a recording-medium-facing surface facing the recording medium and its vicinity, and being magnetically coupled to each other in a position far from the recording-medium-facing surface;
• a gap layer being disposed between the pole portions facing each other;
• and
• a thin film coil being disposed between the first and the second magnetic layers in a state of being insulated from the first and the second magnetic layers,
• wherein the second magnetic layer includes a coupling structure having:
• a first magnetic layer portion having an exposed surface exposed to the recording-medium-facing surface, being disposed so as to extend from the recording-medium-facing surface to a predetermined coupling position far from the recording-medium-facing surface, and determining a recording track width of the recording medium, and
• a second magnetic layer portion being magnetically coupled to the first magnetic layer portion in the coupling position, and extending in a direction away from the recording-medium-facing surface,
• the exposed surface of the first magnetic layer portion includes a first edge positioned on a side far from the gap layer, and a second edge positioned on a side near the gap layer, and
• a width of the second edge is larger than a width of the first edge, and is equal to or larger than a width of the exposed surface in any middle position between the first and the second edges.