Diffractive optical element and method for producing the same
OwnerMasaaki Nakabayashiinventor
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Abstract
A diffractive optical element includes a blazed diffraction grating having inclined facets and vertical facets arrayed in an alternating sequence, in which only the vertical facets of the blazed diffraction grating are frosted by ashing. Another diffractive optical element includes a blazed diffraction grating having inclined facets and vertical facets arrayed in an alternating sequence, in which only the vertical facets of the blazed diffraction grating have an opaque film formed thereon.
Claims19
A diffractive optical element comprising:
- a blazed diffraction grating having inclined facets and vertical facets arrayed in an alternating sequence,
- wherein only the vertical facets of the blazed diffraction grating are frosted by ashing.
A diffractive optical element comprising:
- a first optical member comprising:
- a first substrate;
- and
- a first resin layer formed on the first substrate, the first resin layer comprising a first blazed diffraction grating on its surface, the first blazed diffraction grating having inclined facets and vertical facets arrayed in an alternating sequence;
- and
- a second optical member comprising:
- a second substrate;
- and
- a second resin layer formed on the second substrate, the second resin layer comprising a second blazed diffraction grating on its surface, the second blazed diffraction grating having inclined facets and vertical facets arrayed in an alternating sequence,
- wherein the first and second optical members are bonded to each other so that the first and second resin layers face each other, and
- wherein only the vertical facets of the first and second blazed diffraction gratings are frosted by ashing.
A method for producing a diffractive optical element comprising the steps of:
- forming a resin layer on a substrate, the resin layer comprising a blazed diffraction grating on its surface, the blazed diffraction grating having inclined facets and vertical facets arrayed in an alternating sequence;
- forming an antireflection coating only on the inclined facets;
- and
- ashing the blazed diffraction grating to thereby frost only the vertical facets of the blazed diffraction grating.
A diffractive optical element comprising:
- a blazed diffraction grating having inclined facets and vertical facets arrayed in an alternating sequence,
- wherein only the vertical facets of the blazed diffraction grating have an opaque film formed thereon.
A diffractive optical element comprising:
- a first optical member comprising:
- a first substrate;
- and
- a first resin layer formed on the first substrate, the first resin layer comprising a first blazed diffraction grating on its surface, the first blazed diffraction grating having inclined facets and vertical facets arrayed in an alternating sequence;
- and
- a second optical member comprising:
- a second substrate;
- and
- a second resin layer formed on the second substrate, the second resin layer comprising a second blazed diffraction grating on its surface, the second blazed diffraction grating having inclined facets and vertical facets arrayed in an alternating sequence,
- wherein the first and second optical members are bonded to each other so that the first and second resin layers face each other;
- and
- wherein only the vertical facets of the first and second blazed diffraction gratings have an opaque film formed thereon.
A method for producing a diffractive optical element, comprising the steps of:
- forming a resin layer on a substrate, the resin layer comprising a blazed diffraction grating on its surface, the blazed diffraction grating having inclined facets and vertical facets arrayed in an alternating sequence;
- applying an opaque film to the inclined facets and the vertical facets of the blazed diffraction grating by dipping;
- and
- removing only the opaque film on the inclined facets by anisotropic etching of the blazed diffraction grating.
Dependencies are inferred from the claim text.