US 2003/0112445 A1Published application

Apparatus and methods for high accuracy metrology and positioning of a body

AssigneeZygo Corporation

InventorsChristopher James Evans, Carl A. Zanoni

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Abstract

Apparatus and methodology by which the position, angular orientation, and departure of a moving body, such as a scanning head, can be measured with high accuracy with respect to a nominally straight line as the body translates along that line. Monolithic metrology and scanning heads with integrally formed metrology surfaces are provided and fabricated of preferably identical materials having low thermal coefficients and high temporal stability. Measuring systems operate in conjunction with the integral metrology surfaces to provide interferometric information by which the position and angular attitude of the moving body is constantly monitored. Calibration arrangements are provided for determining the absolute position and attitude of the moving body with respect to the metrology frame as the two move relative to one another so that any errors can be compensated with appropriate correction functions.

Claims15

Dependent claims

Apparatus for the high accuracy, multiple degree of freedom metrology and positioning of a body, said apparatus comprising:

a first element made preferably from a low temperature coefficient, temporally stable material including integral metrology surfaces each of which is used as one surface of a measuring system and are configured and arranged to serve as a metrology frame;
a second element made from a low temperature coefficient, temporally stable material including integral metrology surfaces which are used in conjunction with the integral metrology surfaces on said first element;
at least one slide and at least one actuator for moving said second element relative to the first element by a large distance in at least one dimension;
and
multiple measuring systems configured and arranged to operate in conjunction with said integral metrology surfaces of said first and second elements to provide information by which the position and angular attitude of said second element with respect to said first element can be determined.

2 more elements

Dependencies are inferred from the claim text.