Inspection method and device for detecting defect

Abstract

An inspection method for detecting a defect in a test object. A particulate is generated, then the generated particulate is introduced into a test object. Subsequently, light having high directivity is emitted such that the light passes in the vicinity of the test object to irradiate the particulate discharged from the test object, thereby making the particulate visible. An inspection apparatus for detecting a defect in a test object, including a particulate generating means for generating a particulate, a particulate introducing means for introducing the particulate into a test object, and a light emitting means for emitting light with high directivity that passes in the vicinity of the test object and irradiates the particulate discharged from the test object thereby to visualize the particulate. The inspection method and apparatus detect a defect of a test object with high sensitivity, permit easier identification and recording of the location of a defect, and shorten an inspection time and the time required for the pre-treatment and post-treatment before and after an inspection, or obviate the need for the pre-treatment and post-treatment.

Dependencies are inferred from the claim text.