Laser beam irradiating apparatus, laser beam irradiating method, and method of manufacturing a semiconductor device

A laser beam irradiating apparatus, comprising:

• a plurality of lasers;
• means for synthesizing a plurality of laser beams emitted respectively from said plurality of lasers;
• means for moving said synthesized laser beam on a substrate;
• and
• means for keeping a specific shape of said synthesized laser beam on said substrate,
• wherein said synthesized laser beam is incident on said substrate at a constant angle.

A laser beam irradiating apparatus, comprising:

• a plurality of lasers;
• means for expanding spots of a plurality of laser beams emitted respectively from said plurality of lasers in a longer direction;
• means for synthesizing said plurality of expanded laser beams into a single laser beam on a stage;
• means for moving said synthesized laser beam on a substrate;
• and
• means for keeping a specific shape of said synthesized laser beam on said substrate.

A laser beam irradiating apparatus, comprising:

• a plurality of lasers;
• means for expanding spots of a plurality of laser beams emitted respectively from said plurality of lasers in a longer direction;
• means for synthesizing said plurality of expanded laser beams;
• means for moving said synthesized laser beam on a substrate;
• and
• means for keeping a specific shape of said synthesized laser beam on said substrate, p1 wherein said synthesized laser beam is incident on said substrate at a constant angle.

A method of irradiating a laser beam, comprising:

• emitting a plurality of laser beams respectively from a plurality of lasers;
• synthesizing said plurality of laser beams;
• and
• irradiating said synthesized laser beam to a target object by moving said synthesized laser beam on said target object while keeping a specific shape thereof.

A method of irradiating a laser beam, comprising:

• emitting a plurality of laser beams respectively from a plurality of lasers;
• synthesizing said plurality of laser beams;
• and
• irradiating said synthesized laser beam to a target object by moving said synthesized laser beam on said target object while keeping a specific shape thereof,
• wherein said synthesized laser beam is incident on said target object at a constant angle.

A method of irradiating a laser beam, comprising:

• emitting a plurality of laser beams respectively from a plurality of lasers;
• expanding spots of said plurality of laser beams in a longer direction;
• synthesizing said plurality of expanded laser beams;
• and
• irradiating said synthesized laser beam to a target object by moving said synthesized laser beam on said target object while keeping a specific shape thereof.

A method of irradiating a laser beam, comprising:

• emitting a plurality of laser beams respectively from a plurality of lasers;
• expanding spots of said plurality of laser beams in a longer direction;
• synthesizing said plurality of expanded laser beams;
• and
• irradiating said synthesized laser beam to a target object by moving said synthesized laser beam on said target object while keeping a specific shape thereof,
• wherein said synthesized laser beam is incident on said target object at a constant angle.