Piezoelectric ink-jet printhead and method for manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJae-Woo Chung, Jae-Chang Lee, Seung-Mo Lim
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AssigneeSamsung Electronics Co., Ltd.
InventorsJae-Woo Chung, Jae-Chang Lee, Seung-Mo Lim
Estimating the term…
A piezoelectric ink-jet printhead and a method for manufacturing the same, wherein the piezoelectric ink-jet printhead is formed by stacking three monocrystalline silicon substrates on one another and adhering them to one another. The three substrates include an upper substrate, through which an ink supply hole is formed and a pressure chamber is formed on a bottom surface thereof; an intermediate substrate, in which an ink reservoir and a damper are formed; and a lower substrate, in which a nozzle is formed. A piezoelectric actuator is monolithically formed on the upper substrate. A restrictor, which connects the ink reservoir to the pressure chamber in flow communication, may be formed on the upper substrate or intermediate substrate.
A piezoelectric ink-jet printhead comprising:
A method for manufacturing a piezoelectric ink-jet printhead, comprising:
A piezoelectric ink-jet printhead comprising:
Dependencies are inferred from the claim text.