Lattice array-structured piezoelectric actuator and method for producing the same

Abstract

A common electrode and a signal electrode are separately formed on two major faces of each of tabular piezoelectric actuator elements arrayed on a substrate. On a flexible printed circuit board, formed are electric bonding pads, which are to be electrically connected with the substrate of the actuator elements. A semi-spherical bump including a conductive core and a conductive sealant is formed on each of pads. The actuator elements having substrate is made to face the flexible printed circuit board, and heated under pressure to thereby electrically bond the signal electrodes (at their electric bonding area) to the corresponding bumps. Thus bonded, there exists a gap around the core, and it allows the actuator area of the signal electrode to act completely free, not interfered with any other.

Dependencies are inferred from the claim text.