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US 2003/0112296 A1Published application
Method of fabricating an ink jet nozzle arrangement
AssigneeSilverbrook Research Pty Ltd
InventorsKia Silverbrook, Gregory John McAvoy
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Abstract
A method of fabricating an ink jet nozzle arrangement including the steps of providing a silicon wafer. A plurality of permanent layers are deposited on one side of the wafer. A nozzle region or chamber is etched in the permanent layers to the silicon wafer level. An actuator and ink ejection port are etched on at least one permanent layer so that the ink ejection port is in communication with the nozzle chamber for effecting ink ejection.
Claims7
A method of fabricating an ink jet nozzle arrangement including the steps of:
- providing a wafer;
- depositing a plurality of permanent layers on one side of the wafer;
- forming a nozzle chamber;
- and
- working at least one permanent layer to form an ink ejection port in communication with said nozzle chamber and an actuator, for effecting ink ejection from said port, in said at least one permanent layer.
2 more elements
Dependencies are inferred from the claim text.