Probe card covering system and method
AssigneeFormFactor, Inc.
InventorsBenjamin N. Eldridge, Carl V. Reynolds
Life of this patent
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Abstract
The present invention discloses a cover over electrical contacts of a probe card used in testing die on a wafer. A testing machine is disclosed as having the covered probe card therein. Various mechanisms for uncovering the electrical contacts while it is located in the tester machine are disclosed.
Claims33
In combination:
- an electronic probe card for testing a die on a wafer;
- said probe card having contacts adapted for electrical engagement with said die;
- and,
- a removable cover connected to said probe card and positionable in a first position over said contacts of said probe card, said cover being movable to a second position exposing said contacts for said engagement with said die;
- and,
- wherein said cover is movable from said first position to said second position while said probe card is located in a wafer testing machine.
A method for protecting an electronic probe card for testing die on a wafer, the probe card having contacts adapted for electrical engagement with said die, comprising the acts of:
- providing an electronic probe card for testing a die on a wafer, said probe card having contacts adapted for electrical engagement with the die;
- covering said contacts with a cover;
- mounting said probe card with said cover in a wafer testing machine;
- and thereafter,
- removing said cover from said contacts while said probe card is in said testing machine to expose said contacts for testing the die in said testing machine.
A covering for an electronic probe card for testing a die on a wafer, the probe card having contacts adapted for electronic engagement with the die, comprising:
- a removable cover connectable to said probe card and positionable in a first position over the contacts of the probe card, said cover being movable to a second position exposing said contacts for said engagement with the die;
- and,
- means for engaging a holder wherein said cover is movable from said first position to said second position while said probe card is located in a wafer testing machine by having said means for engaging a holder held by a holder in the testing machine.
Dependencies are inferred from the claim text.