Saw device and production method therefor
OwnerSatoshi Matsuo, Takashi Inoue +1inventors
InventorsSatoshi Matsuo, Takashi Inoue, Yoshiki Murakami
Life of this patent
Estimating the term…
Abstract
A SAW device is highly moisture-resistant, and thus, does not deteriorate in electrical properties. Plural SAW elements each having IDT electrodes mainly composed of aluminum are formed on a piezoelectric substrate. Then, the piezoelectric substrate is soaked in a solution containing phosphorous-ion, washed in water, and dried after being taken out of the solution. The piezoelectric substrate is then divided by dicing into each SAW element after the element is measured in frequency characteristics and sorted. Then, the SAW element is mounted to a package and electrically connected with a wire. Then, a lid closes an opening of the package.
Claims8
A surface acoustic wave (SAW) device comprising:
- a piezoelectric substrate;
- an electrode containing aluminum on said piezoelectric substrate;
- and
- an aluminum phosphate layer covering only over said electrode.
A method for manufacturing a surface acoustic wave (SAW) device, comprising the steps of:
- forming an electrode containing aluminum on a piezoelectric substrate;
- and
- forming an aluminum phosphate layer over the electrode through soaking the piezoelectric substrate in solution containing phosphorous-ion.
Dependencies are inferred from the claim text.