Body contact silicon-on-insulator transistor and method
AssigneeTexas Instruments Incorporated
InventorSreenath Unnikrishnan
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AssigneeTexas Instruments Incorporated
InventorSreenath Unnikrishnan
Estimating the term…
A method for fabricating a body contact silicon-on-insulator transistor (10) includes forming a semiconductor substrate (12) over an insulator (14) and lightly doping the semiconductor substrate (12) to form a body region (18). The method also includes forming a gate (20) over the semiconductor substrate (12) and separated from the semiconductor substrate (12) by a gate insulator layer (21). The gate (20) defines a source region (22), a drain region (24) and a contact region (26). The method also includes masking a portion (36) of the gate (20) and the contact region (26) and heavily doping the source region (22), the drain region (24) and an unmasked portion (36) of the gate (20) with a material having a conductivity substantially opposite a conductivity of the body region (18).
A method for fabricating a body contact transistor, comprising:
A method for fabricating a body contact transistor, comprising:
A body contact transistor, comprising:
Dependencies are inferred from the claim text.