Method and apparatus for repair of defects in materials with short laser pulses
AssigneeNational Research Council of Canada
InventorsPaul B. Corkum, Emmanuel Dupont, Hui Chun Liu, Xiaonong Zhu
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AssigneeNational Research Council of Canada
InventorsPaul B. Corkum, Emmanuel Dupont, Hui Chun Liu, Xiaonong Zhu
Estimating the term…
A method of accurately and precisely providing desired functionality to an electronic or opto-electronic component is disclosed in which a Femtosecond laser pulse is used to ablate material from a surface of or from within a component. The component is in active operation during the ablation process in order to facilitate the ablation process. The process also involves detection and feedback to indicate when a repair is sufficiently complete. The detection is also performed while the component is powered allowing in-situ detection and ablation. Of course, forms of facilitation other than feedback such as monitoring are also applicable to the invention.
A method of laser ablation from a component comprising the steps of:
A method of laser ablation from an component comprising the steps of:
A system for ablating material from an electronic or opto-electronic component comprising:
Dependencies are inferred from the claim text.