Method for controlling chamber inner wall surface of an inductively coupled plasma etching apparatus
AssigneeLam Research Corporation
InventorShu Nakajima
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Abstract
An inductively coupled plasma etching apparatus includes a chamber for generating a plasma therein. The chamber is defined by walls of a housing. A coil for receiving high frequency (RF) power is disposed adjacent to and outside of one of the walls of the housing. A metal plate is disposed adjacent to and outside of the wall of the housing that the coil is disposed adjacent to. The metal plate is positioned in a spaced apart relationship between the coil and the wall of the housing and has radial slits formed therein that extend transversely to the coil. A connector electrically connects the metal plate to the coil. A method for controlling an inner surface of a wall defining a chamber in which a plasma is generated is also described.
Claims3
In an inductively coupled plasma etching apparatus, a method for controlling an inner surface of a wall defining a chamber in which a plasma is generated, the method comprising:
- providing a metal plate between a coil for receiving high frequency (RF) power and the plasma generated in the chamber such that the metal plate does not contact the coil, the metal plate having a plurality of metal slits formed therein that extend transversely to the coil and being electrically connected to the coil;
- and
- conducting a plasma etching operation in the inductively coupled plasma etching apparatus, the deposition of a reaction product on an inner surface of a wall positioned between the metal plate and the plasma and the sputtering of the reaction product from the inner surface of the wall being substantially uniform so that an amount of the reaction product sufficient to disable the plasma etching operation does not accumulate on the inner surface of the wall.
Dependencies are inferred from the claim text.