US 2003/0111440 A1 · Method of fabricating and a device that includes nanosize pores having well controlled geometries

Abstract

A method of fabricating nanosized holes with controlled geometries employs tools and methods developed in the microelectronics industry. The method exploits the fact that epitaxially grown film thicknesses can be controlled within a few atomic monolayers and that by using etching techniques, trenches and channels can be created that are only a few nanometers wide. The method involves bonding two shallow channels at an angle such that a nanopore is defined by the intersection. Thus, a nanopore-defining device includes a nanopore with dimensions that are determined by the dimensions and orientations of the intersecting channels, with the dimensions being accurately controlled within a few monolayers.

Claims31

Dependent claims

A method of manufacturing pores having controlled geometries and locations comprising the steps of:

forming a first channel in a first member, including using fabrication techniques that enable formation of a first channel-defining layer having a well controlled thickness and including removing at least a region of said first channel-defining layer to form said first channel so as to have a controlled geometry in a thickness direction of said first channel-defining layer;
forming a second channel in a second member, including using said fabrication techniques to form a second channel-defining layer having a well controlled thickness and including removing at least a region of said second channel-defining layer to form said second channel so as to have a controlled geometry in a thickness direction of said second channel-defining layer;
positioning said first member relative to said second member such that said first channel is in alignment with said second channel in at least one location, thereby defining a location of said pore;
and
enabling fluid communication between said first and second channels via said pore.

2 more elements

A method of forming a nanopore comprising the steps of:

forming a first multi-layer segment having a first top layer and a first intermediate layer;
forming a second multi-layer segment having a second top layer and a second intermediate layer;
forming a first channel though said first intermediate layer, said first channel having a longitudinal direction;
forming a second channel through said second intermediate layer, said second channel having a longitudinal direction;
and
bonding said first and second multilayer multi-layer segments with said longitudinal directions being misaligned relative to each other such that an intersection of said first channel and said second channel defines boundaries of said nanopore.

3 more elements

A method of forming an opening having a well controlled geometry comprising the steps of:

forming a first segment, said first segment including a first top layer having predetermined dimensions, a first intermediate layer having predetermined dimensions and a first base layer, said first intermediate layer being located between said first top layer and said first base layer;
forming a second segment, said second segment including a second top layer having predetermined dimensions, a second intermediate layer having predetermined dimensions and a second base layer, said second intermediate layer being located between said second top layer and said second base layer;
forming a first path in said first intermediate layer;
forming a second path in said second intermediate layer;
and
bonding said first segment relative to said second segment such that an intersection of said first path with said second path defines the boundaries of said opening.

3 more elements

A nanopore-defining device comprising:

a first multi-layer segment having a sequence of layers that includes two layers that are spaced apart to define a first surface slot having a first longitudinal direction, said first multi-layer segment having an interior path to said first surface slot;
and
a second multi-layer segment having a sequence of layers that includes two layers that are spaced apart to define a second surface slot having a second longitudinal direction, said second multi-layer segment having an interior path to said second surface slot,
wherein said first and second multi-layer segments are connected such that said first surface slot is adjacent to and in fluid communication with said second surface slot, while said first longitudinal direction is misaligned with said second longitudinal direction.

1 more element

Dependencies are inferred from the claim text.

Method of fabricating and a device that includes nanosize pores having well controlled geometries

Life of this patent

Method of fabricating and a device that includes nanosize pores having well controlled geometries

Life of this patent

Abstract

Claims31